Power Scavenging Microsystem for Smart Contact Lenses.

On-the-eye microsystems such as smart contacts for vision correction, health monitoring, drug delivery, and displaying information represent a new emerging class of low-profile (≤ 1 mm) wireless microsystems that conform to the curvature of the eyeball surface. The implementation of suitable low-profile power sources for eye-based microsystems on curved substrates is a major technical challenge addressed in this paper. The fabrication and characterization of a hybrid energy generation unit composed of a flexible silicon solar cell and eye-blinking activated Mg-O2 metal-air harvester capable of sustainably supplying electrical power to smart ocular devices are reported. The encapsulated photovoltaic device provides a DC output with a power density of 42.4 µW cm-2 and 2.5 mW cm-2 under indoor and outdoor lighting conditions, respectively. The eye-blinking activated Mg-air harvester delivers pulsed power output with a maximum power density of 1.3 mW cm-2 . A power management circuit with an integrated 11 mF supercapacitor is used to convert the harvesters' pulsed voltages to DC, boost up the voltages, and continuously deliver ≈150 µW at a stable 3.3 V DC output. Uniquely, in contrast to wireless power transfer, the power pack continuously generates electric power and does not require any type of external accessories for operation.

Refractive-type varifocal liquid-crystal Fresnel lenses for smart contacts.

We demonstrate the implementation of a low-power, low-profile, varifocal liquid-crystal Fresnel lens stack suitable for tunable imaging in smart contact lenses. The lens stack consists of a high-order refractive-type liquid crystal Fresnel chamber, a voltage-controlled twisted nematic cell, a linear polarizer and a fixed offset lens. The lens stack has an aperture of 4 mm and thickness is ∼980 µm. The varifocal lens requires ∼2.5 VRMS for a maximum optical power change of ∼6.5 D consuming electrical power of ∼2.6 µW. The maximum RMS wavefront aberration error was 0.2 µm and the chromatic aberration was 0.008 D/nm. The average BRISQUE image quality score of the Fresnel lens was 35.23 compared to 57.23 for a curved LC lens of comparable power indicating a superior Fresnel imaging quality.

Flexible and Semi-Transparent Silicon Solar Cells as a Power Supply to Smart Contact Lenses.

Supplying electric power to wearable IoT devices, particularly smart contact lenses (SCLs), is one of the main obstacles to widespread adoption and commercialization. In the present study, we have successfully designed, fabricated, and characterized semi-transparent, self-supported, and flexible single crystalline silicon solar cells using a single-sided micromachining procedure. Optical, mechanical, and electrical simulations, together with the practical measurements, verify the application of our developed solar cells to be mounted on a limited-footprint and flexible SCL. The 15 µm-thick silicon solar cells conformally fit on a dome-shaped contact lens (ROC = 8 mm) without any mechanical and electrical degradation. This homojunction photovoltaic device containing an array of micro-holes exhibits a V oc, J sc, and maximum power density of 504 mV, 6.48 mA cm-2, and 1.67 mW cm-2, respectively, at 25% visible light transparency under an AM1.5 one sun condition. Furthermore, the measurements were conducted under low-intensity indoor light conditions and resulted in a maximum power output of 25 and 42 µW cm-2 for the 50 and 25% transparent solar cells, respectively.

Correcting Presbyopia With Autofocusing Liquid-Lens Eyeglasses.

OBJECTIVE: Presbyopia, an age-related ocular disorder, is characterized by the loss in the accommodative abilities of the human eye. Conventional methods of correcting presbyopia divide the field of view, thereby resulting in significant vision impairment. We demonstrate the design, assembly and evaluation of autofocusing eyeglasses for restoration of accommodation without dividing the field of view. METHODS: The adaptive optics eyeglasses comprise of two variable-focus liquid lenses, a time-of-flight range sensor and low-power, dual microprocessor control electronics, housed within an ergonomic frame. Subject-specific accommodation deficiency models were utilized to demonstrate high-fidelity accommodative correction. The abilities of this system to reduce accommodation deficiency, its power consumption, response time, optical performance and MTF were evaluated. RESULTS: Average corrected accommodation deficiencies for 5 subjects ranged from -0.021 D to 0.016 D. Each accommodation correction calculation was performed in ∼67 ms which consumed 4.86 mJ of energy. The optical resolution of the system was 10.5 cycles/degree, and featured a restorative accommodative range of 4.3 D. This system was capable of running for up to 19 hours between charge cycles and weighed ∼132 g. CONCLUSION: The design, assembly and performance of an autofocusing eyeglasses system to restore accommodation in presbyopes has been demonstrated. SIGNIFICANCE: The new autofocusing eyeglasses system presented in this article has the potential to restore pre-presbyopic levels of accommodation in subjects diagnosed with presbyopia.

Molecular bridge-mediated ultralow-power gas sensing.

We report the electrical detection of captured gases through measurement of the quantum tunneling characteristics of gas-mediated molecular junctions formed across nanogaps. The gas-sensing nanogap device consists of a pair of vertically stacked gold electrodes separated by an insulating 6 nm spacer (~1.5 nm of sputtered α-Si and ~4.5 nm ALD SiO2), which is notched ~10 nm into the stack between the gold electrodes. The exposed gold surface is functionalized with a self-assembled monolayer (SAM) of conjugated thiol linker molecules. When the device is exposed to a target gas (1,5-diaminopentane), the SAM layer electrostatically captures the target gas molecules, forming a molecular bridge across the nanogap. The gas capture lowers the barrier potential for electron tunneling across the notched edge region, from ~5 eV to ~0.9 eV and establishes additional conducting paths for charge transport between the gold electrodes, leading to a substantial decrease in junction resistance. We demonstrated an output resistance change of >108 times upon exposure to 80 ppm diamine target gas as well as ultralow standby power consumption of <15 pW, confirming electron tunneling through molecular bridges for ultralow-power gas sensing.

Nanostructures for Biosensing, with a Brief Overview on Cancer Detection, IoT, and the Role of Machine Learning in Smart Biosensors.

Biosensors are essential tools which have been traditionally used to monitor environmental pollution and detect the presence of toxic elements and biohazardous bacteria or virus in organic matter and biomolecules for clinical diagnostics. In the last couple of decades, the scientific community has witnessed their widespread application in the fields of military, health care, industrial process control, environmental monitoring, food-quality control, and microbiology. Biosensor technology has greatly evolved from in vitro studies based on the biosensing ability of organic beings to the highly sophisticated world of nanofabrication-enabled miniaturized biosensors. The incorporation of nanotechnology in the vast field of biosensing has led to the development of novel sensors and sensing mechanisms, as well as an increase in the sensitivity and performance of the existing biosensors. Additionally, the nanoscale dimension further assists the development of sensors for rapid and simple detection in vivo as well as the ability to probe single biomolecules and obtain critical information for their detection and analysis. However, the major drawbacks of this include, but are not limited to, potential toxicities associated with the unavoidable release of nanoparticles into the environment, miniaturization-induced unreliability, lack of automation, and difficulty of integrating the nanostructured-based biosensors, as well as unreliable transduction signals from these devices. Although the field of biosensors is vast, we intend to explore various nanotechnology-enabled biosensors as part of this review article and provide a brief description of their fundamental working principles and potential applications. The article aims to provide the reader a holistic overview of different nanostructures which have been used for biosensing purposes along with some specific applications in the field of cancer detection and the Internet of things (IoT), as well as a brief overview of machine-learning-based biosensing.

Low-Profile Induced-Voltage Distance Ranger for Smart Contact Lenses.

OBJECTIVE: In this paper, we present a novel, low-profile, scleral-coil based, distance ranging system which is suitable for smart, accommodating contact lenses. METHODS: We measure the induced emf between a set of four thin semi-circular coils patterned on flexible Kapton substrates that conform to the eyes' sclera. This induced emf is a function of eye gaze angles. The system then determines the distance from the eyes to the desired object via the triangulation of these eye gaze angles Results: Experiments on eyeball simulated tissue gels indicate an accurate prediction of object distance in the 0.1-15 D range with a 0.15 D RMS error and object direction in the -15 to 15-degree arc with 0.4-degree RMS error, respectively. The energy required was determined to be as low as 20 µJ per range reading. CONCLUSION: Experimental data shows that our proposed new method of eye-tracking and distance ranging system can accurately predict eye-gaze angles and object-distance, whilst using only 20 µJ per range reading. SIGNIFICANCE: The high-accuracy, low-profile and reduced energy requirements of the proposed eye-tracking technique, make it suitable for applications in the vast field of adaptive optics such as smart contact lenses and other low-power vision corrective applications.

Parametrically Amplified Low-Power MEMS Capacitive Humidity Sensor.

We present the design, fabrication, and response of a polymer-based Laterally Amplified Chemo-Mechanical (LACM) humidity sensor based on mechanical leveraging and parametric amplification. The device consists of a sense cantilever asymmetrically patterned with a polymer and flanked by two stationary electrodes on the sides. When exposed to a humidity change, the polymer swells after absorbing the analyte and causes the central cantilever to bend laterally towards one side, causing a change in the measured capacitance. The device features an intrinsic gain due to parametric amplification resulting in an enhanced signal-to-noise ratio (SNR). Eleven-fold magnification in sensor response was observed via voltage biasing of the side electrodes without the use of conventional electronic amplifiers. The sensor showed a repeatable and recoverable capacitance change of 11% when exposed to a change in relative humidity from 25-85%. The dynamic characterization of the device also revealed a response time of ~1 s and demonstrated a competitive response with respect to a commercially available reference chip.

Creep deformation in elastomeric membranes of liquid-filled tunable-focus lenses.

Liquid-filled tunable-focus lenses have been demonstrated to be suitable for autofocus eyewear applications. Traditionally, these lenses are constructed using an elastomeric polymer chamber filled with a high-index liquid. In this work, we investigate the effect of elastomeric creep on the deformation and eventual degradation of these tunable lenses. We use numerical analysis of a deformable circular disk representative of the lens and provide rigorous experimental results testing the creep property of a number of elastomers. Finally, we provide a comparative study of different elastomeric materials and select the best one for this application.

Batch-Fabricated α-Si Assisted Nanogap Tunneling Junctions.

This paper details the design, fabrication, and characterization of highly uniform batch-fabricated sidewall etched vertical nanogap tunneling junctions for bio-sensing applications. The device consists of two vertically stacked gold electrodes separated by a partially etched sacrificial spacer layer of sputtered α-Si and Atomic Layer Deposited (ALD) SiO2. A ~10 nm wide air-gap is formed along the sidewall by a controlled dry etch of the spacer. The thickness of the spacer layer can be tuned by adjusting the number of ALD cycles. The rigorous statistical characterization of the ultra-thin spacer films has also been performed. We fabricated nanogap electrodes under two design layouts with different overlap areas and spacer gaps, from ~4.0 nm to ~9.0 nm. Optical measurements reported an average non-uniformity of 0.46 nm (~8%) and 0.56 nm (~30%) in SiO2 and α-Si film thickness respectively. Direct tunneling and Fowler-Nordheim tunneling measurements were done and the barrier potential of the spacer stack was determined to be ~3.5 eV. I-V measurements showed a maximum resistance of 46 × 103 GΩ and the average dielectric breakdown field of the spacer stack was experimentally determined to be ~11 MV/cm.

Tunable-focus lens for adaptive eyeglasses.

We demonstrate the implementation of a compact tunable-focus liquid lens suitable for adaptive eyeglass application. The lens has an aperture diameter of 32 mm, optical power range of 5.6 diopter, and electrical power consumption less than 20 mW. The lens inclusive of its piezoelectric actuation mechanism is 8.4 mm thick and weighs 14.4 gm. The measured lens RMS wavefront aberration error was between 0.73 µm and 0.956 µm.

Low-Cost High-Speed In-Plane Stroboscopic Micro-Motion Analyzer.

Instrumentation for high-speed imaging and laser vibrometry is essential for the understanding and analysis of microstructure dynamics, but commercial instruments are largely unaffordable for most microelectromechanical systems (MEMS) laboratories. We present the implementation of a very low cost in-plane micro motion stroboscopic analyzer that can be directly attached to a conventional probe station. The low-cost analyzer has been used to characterize the harmonic motion of 52.1 kHz resonating comb drive microactuators using ~50 ns pulsed light-emitting diode (LED) stroboscope exposure times, producing sharp and high resolution (~0.5 µm) device images at resonance, which rivals those of several orders of magnitude more expensive systems. This paper details the development of the high-speed stroboscopic imaging system and presents experimental results of motion analysis of example microstructures and a discussion of its operating limits. The system is shown to produce stable stroboscopic LED illumination to freeze device images up to 11 MHz.